WebMar 21, 2016 · The resist material exhibiting the best combination of the desired properties, named mr-PosEBR, is two times more sensitive than PMMA 495k and performs comparably to the known high resolution resist ZEP520A at 30 kV. WebTrade name: 495 PMMA Series Resists in Anisole (Contd. of page 1) 34.0.3 · Precautionary statements P101 If medical advice is needed, have product container or label at hand. …
Page 1/8 Material Safety Data Sheet acc. to ISO/DIS 11014
WebApr 27, 2012 · No additional contamination was observed when etching PMMA resist at 630 V bias, despite the resist baking to the film. ... Ar ion milling (40 min at 300 V sample bias) of Ta/Ni/Ta/GaAs L-bar structures defined with PMMA 495K-A5 e-beam resist. Traces are offset for clarity and significant residual gas peaks are, again, labeled. ... law in house
Practicum of Electron Beam Lithography - University of …
WebPMMA Resist is the industry standard electron beam resist used across academia and industry for high resolution features and lift-off applications. It can also be used in nanoimprint applications as well as other fab and R&D processes such as graphen … View the full answer Transcribed image text: WebSep 15, 2024 · PMMA 495K A4 polymer is spin coated at a desired speed of 3000 rpm for 1 minute. 7. Let it cool for about 1 minute. Use nitrogen to remove dirt from wafer, if any. 8. Repeat step 2-7 for the next... WebPMMA 495K A4, 10.8 cst for PMMA 950K A2 and 41.50 cst for PMMA 950K A4 [8, 9]. All have been summarized in table below. No Resist / PMMA Molecular Weight Solids Content, % Viscosity , law in harvard